HORIBA JOBIN YVON UVISEL 2 Scientific Spectroscopic Ellipsometer
Manufacturer Catalogue Information about
HORIBA JOBIN YVON UVISEL 2 Scientific Spectroscopic Ellipsometer :
Standard Configuration
Light source Spot size
Spectral range Monochromator
Sample stage
Sample viewing
Goniometer
Options
Accessories Ellipsometer table base
Performance
150 W Xenon
Automated achromatic microspots,
8 sizes down to 35 μm (at normal incidence) 190 – 1000 nm
NIR extension up to 2100 nm
Double monochromator
For FUV-VIS range: Twin PMT detectors
For NIR extension: InGaAs detector
200 mm x 200 mm, automatic XYZ adjustment, vacuum chucks, Z height 35 mm, automated autofocus and tilt alignment
Vision system using CCD camera
Field of view: 6.5 x 3.5 mm at 70°
Automatic variable angle from 35° to 90°
Temperature controlled cell, liquid cell Electrochemical cell, sealed cell, rotation stage, Transmission mount, plastic film mount Dimension (wxdxh): 1084 x 984 x 802 mm
UVISEL 2 Specifications
Tests performed on NIST 1000Å SiO2/Si
Accuracy d: = 0.25 Å – n(632.8 nm): = 0.0002 Repeatability d ± 0.25 Å – n(632.8 nm) ± 0.0002
Facility Requirements
Operating systems Power supply Dimension (wxdxh) Certificate
Windows® XP/7
110/220 VAC, 400 W, 50/60 Hz 1084 x 984 x 802 mm
CE
4102enuJ-
63
051
The UVISEL 2 ellipsometer includes a class 1 laser.
