Description
Novellus Inova XT PVD 300mm Wafer Complete Tool
Sputter, Preclean, Dual Brooks Robot Transfer, Complete Tool
Seems to be complete. No manual. Any software licensing is buyer’s responsibility.
Tool Configuration:
– MAG7 Brooks Robots
– MC3 Novellus Module controller
– Pfeiffer Turbo and turbo controller
– 3 CTI/Hilex/Brooks Cryo pump
– Brooks FOUP cassette wafer loader
– VAT throttle valve and controllers
– AE PDX 5000 RF Generator
– AE RFG 5500 RF Generator
– MKS RF Generator
– DC power supply
– Right Degas Chamber
– PVD chamber
– Preclean Chamber
– Left Degas Chamber
– Transfer Module with dual blade
