ULVAC FRE-200E XeF2 Release Etch Cluster Tool – Year 2014
Condition: Used
| Manufacturer | ULVAC |
| Model | FRE-200E |
| Condition | Used |
| Equipment details | RF Power supply. |
| Phase, wire | 3Phase, 3Wire+ G Line |
| Full load current | 142A |
| Max load(unit) | 15.5A |
| Over current protective | 250A |
| Short circuit current rating | 5Ka |
Voltage: 208V
Frequency: 60Hz
Phase, Wire: 3Phase, 3Wire+ G Line
Full Load Current: 142A
Max Load (Unit): 15.5A
Over Current Protective: 250A
Short Circuit Current Rating: 5Ka
Includes: (1) Used ULVAC – XeF2 Etch Release FRE-200E
