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ULVAC FRE-200E XeF2 Release Etch Cluster Tool – Year 2014

ULVAC FRE-200E XeF2 Release Etch Cluster Tool – Year 2014

Condition: Used

Manufacturer ULVAC
Model FRE-200E
Condition Used
Equipment details RF Power supply.
Phase, wire 3Phase, 3Wire+ G Line
Full load current 142A
Max load(unit) 15.5A
Over current protective 250A
Short circuit current rating 5Ka

 

Voltage: 208V

Frequency: 60Hz

Phase, Wire: 3Phase, 3Wire+ G Line

Full Load Current: 142A

Max Load (Unit): 15.5A

Over Current Protective: 250A

Short Circuit Current Rating: 5Ka

Includes: (1) Used ULVAC – XeF2 Etch Release FRE-200E

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