Novellus Inova XT PVD 300mm Wafer Complete Tool
Sputter, Preclean, Dual Brooks Robot Transfer, Complete Tool

Seems to be complete. No manual. Any software licensing is buyer’s responsibility.

Tool Configuration:

– MAG7 Brooks Robots
– MC3 Novellus Module controller
– Pfeiffer Turbo and turbo controller
– 3 CTI/Hilex/Brooks Cryo pump
– Brooks FOUP cassette wafer loader
– VAT throttle valve and controllers
– AE PDX 5000 RF Generator
– AE RFG 5500 RF Generator
– MKS RF Generator
– DC power supply
– Right Degas Chamber
– PVD chamber
– Preclean Chamber
– Left Degas Chamber
– Transfer Module with dual blade