CHA 600 RAP Electron Beam Evaporator
4 Pocket CHA electron beam gun. Temescal CV-8 Power supply with XYS sweep.
substrate heat via quartz lamps.
Substrate flip fixture installed.
Deposition control via a Telemark 861 deposition controller.
Dual xtal head.
Dual ionization gauge controller with dual convectron gauges.
Used to evaporate Gold and Titanium.
Cryogenic pump: 8″ CTI
Mechanical pump: 23-57 CFM, dual stage
Cold trap: 2.5 liter capacity, 200 sq. inches of surface area, 10 hours holding time
High vacuum valve: 7-3/4″ I.D., seals vertically
Foreline/Roughing valves: 3″ I.D.
Valve actuation: Electro-pneumatic (all vacuum valves)
Valve sequencing: Manual and automatic (Auto-Tech II)
Ionization gauge control: Dual ionization gauge tube, auto ranging with dual convectron positions.
Dimensions: 79″H x 43″W x 37″D
Weight: 1,200 pounds
Utilities
Electrical: 208/10/70A/4-wire connection with ground (3 phase, 5-wire also available)
Water: 10 GPM (minimum)
Air: 90-110 PSIG
1200 lbs evaporator, 650 lbs CV8 PS, 100 1bs mechanical pump, 75 lbs Helium compressor.
